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Rutherford Back Scattering(RBS)/Hydrogen Forward Scattering(HFS)/Nuclear Reaction Analysis(NRA)/Medium Energy Scattering(MEIS)/Proton-Induced X-ray Emission(PIXE)

Equipment: RBS/HFS/NRA

Working Principle

RBS uses high energy ion beam (proton or alpha particles) to determine the structure and composition by measuring backscattered ions.

Technical Information

Energy spectrum of Si implanted with As

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