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Scanning Electron Microscope (SEM)/Energy Dispersive Spectroscopy (EDX)/Cathodoluminescence (CL)

Equipment: Jeol JSM-7610F

Working Principle

An electron beam scanned or rastered on surface interacts with surface atoms and produces information about surface topography and composition.

Technical Information

Planar Structure Analysis of an IC Chip

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Last Updated: February 17, 2020
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