Emission Microscope (EMMI)
Equipment: Hamamatsu Phemos 2000
Working Principle
- Contains a high sensitivity Charge-Coupled Device (CCD) that
detects the incoming photons
- Applied force is related to the measured strain (change in sample dimension)
- The wavelength between 350 nm ~ 1100 nm, the range equivalent to visible
and IR light
Technical Information
- Isolate a defect in a sea of circuitry
- Leakage current on device will be detected quickly
- The defect and hot spots on gate oxide, ESD Failure, latch Up, junction leakage,
forward bias, transistors will be pointed
EMMI Picture