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Emission Microscope (EMMI)

Equipment: Hamamatsu Phemos 2000

Working Principle

  • Contains a high sensitivity Charge-Coupled Device (CCD) that detects the incoming photons
  • Applied force is related to the measured strain (change in sample dimension)
  • The wavelength between 350 nm ~ 1100 nm, the range equivalent to visible and IR light

Technical Information

  • Isolate a defect in a sea of circuitry
  • Leakage current on device will be detected quickly
  • The defect and hot spots on gate oxide, ESD Failure, latch Up, junction leakage, forward bias, transistors will be pointed

EMMI Picture

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