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Focused Ion Beam (FIB)/ Focused Ion Beam with Scanning Electron Microscope (FIB-SEM)/ Etching/ Deposition/ Tomography

Equipment: ZEISS Gemini2

Working Principle

Depending on the type of primary ion beam and environmental gas type, sample can be cross-section cut or local cut, or locally deposited by metal. FIB is combined with SEM for imaging.

Technical Information

Cross-section of Lithium Ion Battery

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Last Updated: February 17, 2020
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