Ion Milling
Equipment: Intlvac Nanoquest I
Working Principle
- The ions of an inert gas are accelerated into the surface of a
substrate in vacuum
- Cooling the substrate
- The incident beam angle should be 30 – 60 degree
Technical Information
- Thin and transparent samples
- Good sample for scanning electron microscope (SEM) analysis
- Image and characterize in a transmission electron microscope (TEM)
Sample Preparation Process