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Ion Milling

Equipment: Intlvac Nanoquest I

Working Principle

  • The ions of an inert gas are accelerated into the surface of a substrate in vacuum
  • Cooling the substrate
  • The incident beam angle should be 30 – 60 degree

Technical Information

  • Thin and transparent samples
  • Good sample for scanning electron microscope (SEM) analysis
  • Image and characterize in a transmission electron microscope (TEM)

Sample Preparation Process

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Last Updated: February 17, 2020
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