OBIRCH Imaging Technique

Equipment: Hamamatsu Phemos 2000

Working Principle

  • An IR laser beam scans the DUT
  • Use resistance change to distinguish the defects
  • Color highlights the areas containing defects

Technical Information

  • Isolate the fault
  • Locate shorts, opens, hot spots and defects on circuitry
  • Perform FA from frontside or backside (silicon surface)
  • A very quick and powerful FA tool

Location of Defects