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Spectroscopic Ellipsometer (SE)

Equipment: J.A. Woollam RC2

Working Principle

Ellipsometer is an optical technique for investigating the dielectric properties of thin films. It measures the change of polarization upon reflection ro transmission and compares it to a model.

Technical Information

  • Composition
  • Roughness
  • Thickness
  • Crystallinity
  • Doping concentration
  • Electrical conductivity
  • Material properties of a thin film or a film stack

SE Data

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Last Updated: February 17, 2020
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